美国MKS流量计 MKS Instruments
MKS Mass Flow Meters

MKS 是著名的先进生产工艺控制设备供应商之一，其产品广泛地应用于各种半导体器件、平板显示器、太阳能电池、LED、光学储存介质、玻璃镀膜、光电产品等生产设备及制药和医学成像设备。MKS前瞻性的创新开发，推动其产品一直处于全球技术领先地位。MKS的电源、测量、控制和复杂气体相关的工艺监控技术，改善了设备完好率和产品成品率，提高了产量和产品性能。MKS产品起源于我们的压力和流量测量与控制核心技术，延伸到材料递送、气体成份分析、工艺控制、信息管理、电源和反应气体发生器及真空技术。

MKS 成立于1961年，总部位于美国东部波士顿以北的Andover。

MKS产品目录 PRODUCTS CATALOG

校准系统 Calibration
控制系统 Control Systems
数据采集和分析 Data Collection & Analysis
流量测量、控制和验证 Flow Measurement, Control & Verification
加热带 Heater Jackets
微波产品 Microwave Products
光学气体分析仪 Optical Gas Analyzers
臭氧产品 Ozone Products
压力与真空控制 Pressure/Vacuum Control
压力与真空测量 Pressure/Vacuum Measurement
远程等离子体源 Remote Plasma Sources
残余气体分析仪（RGA）/质谱仪 Residual Gas Analysis/Mass Spectrometry
射频和直流电源 RF & DC Power
真空管道和连接件 Vacuum Components
真空压力规 Vacuum Gauges
真空隔离阀 Valves

美国MKS INSTRUMENTS成立于1961年，作为半导体零部件的供应商，在气体、真空仪器及制程控制应用等方面有技术独到之处，美国万机仪器MKS Instruments产品起源于压力测量和控制核心技术，延伸到材料递送、气体成分分析、静电荷控制、工艺控制、信息管理、电源和反应气体发生器及真空技术，其产品广泛地应用于各种半导体生产设备和制造过程中。美国MKS产品包括：美国MKS流量计、MKS薄膜真空计、MKS流量控制阀。

代表型号：AX7690,AX3060,AX7610,AX2500,AX2600,AX7670,AX7680,AX7685,AX7645,LIQUOZON,NOVA-25,NOVA-50,SPECTRUMB5002, SPECTRUM B11002,ACG-3B,ACG-6B,ACG-10B,GHW-12,GHW-25,GHW-50,SPECTRUM 3013,SUREPOWER QL3513, SUREPOWERQL6513, SUREPOWER QL10513, SUREPOWER QL13013,OPTIMA OPT-50, OPTIMA OPT-100, OPTIMA OPT-200, OPTIMA OPT-400,OPTIMA OPT-600,RPG-50,RPG-100,ENI-RFPC,MWH-5,MW-10D,ENI-2500-13.56,MWH-100,MWH-25,VIPROBE,1249A,148JA11CR1M, 148JA12CR1M, 148JA13CR1M, 148JA14CR1M, 148JA21CR1M, 148JA22CR1M, 148JA23CR1M,
MKS BARATRON 622A01TDE 1 Pa/133.32C70145 Lot 2
MKS Baratron Pressure Switch (41A & 51A)
MKS INSTRUMENTS PORTABLE BARATRON SYSTEM
MKS Instruments Baratron Pressure Transducer 220BHS-2A1
MKS Baratron Type 224/224HA Pressure Switch/Controll?er
MKS Baratron Absolute Pressure Transducer 627B Manual
MKS 621C13TBFHD BARATRON SIGNAL CONDITIONER PRESSURE
MKS PAR-10 BARATRON
MKS BARATRON 627A-13614 .25 Pa/133.32
MKS Baratron Pressure XDCR, 1350-01153, 750B11TCD2GG
MKS BARATRON 223BD-00100AAB PRESSURE TRANSDUCER TYP 223
MKS BARATRON PRESSURE TRANSDUCER 850BRDPCB4GH
MKS Baratron Pressure Transducer 872B12PMD2MT1 100PSIA
MKS BARATRON HEAD UNIT MODEL# 698A12TRA 100 TORR
MKS Model 722A 21TCB3FJ Baratron, 20 TORR Range
MKS Baratron Manometer 100 Torr 622A12TAE new
MKS Baratron Capacitance Manometer 100 Torr 626A12TBETEL UNITY II
MKS BARATRON 627 PRESSURE TRNSDCER 10 TORRTEL UNITY II
MKS BARATRON 627 PRESSURE TRNSDCER 10 TORR
MKS BARATRON PRESSURE SWITCH 51A 450 Torr VCR 1000 -NEW
MKS Baratron Pressure Switch 10 Torr-G 41A-15460 NEW
MKS Baratron Single-end Vacuum Switch, 51A11TGA2BA001
MKS BARATRON PRESSURE TRANSDUCER 722A13TCD2FA
MKS BARATRON PRESSURE GAUGE TRANSDUCER 1000 PSI 840B SS
MKS Baratron Manometer Transducer 1000 Torr 626A13TBE
MKS Baratron Single-end Pressure Switch, 51A13TCA1AA9994

FLOW MEASUREMENT, CONTROL & VERIFICATION
Mass Flow Control with Mass Flow Controllers, Mass Flow Meters and Flow Verifiers, Advanced Materials Delivery, and Integrated Solutions and Subsystems

Accurate, reliable gas flow delivery and control is crucial to many of today’s advanced processes. The MKS family of flow delivery products includes mass flow controllers (MFC), in-situ mass flow verifiers, and flow ratio controllers which accurately and repeatably divide gas flows into precise flow streams to multiple points in the process. MFCs are available in thermal and pressure based sensor technologies, analog and digital communication, and metal or elastomer seals. Enabling our customers to bring their products and processes to market faster, more reliably, and more cost effectively is at the heart of our flow measurement and control product design philosophy.

PRODUCT CATALOG

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Thermal & Pressure-based Mass Flow Controllers & Meters

In Situ Flow Verifiers

Flow Ratio Controllers

Flow-related Products
LITERATURE:

MKS Instruments Flow Measurement & Control Product Line
Gas Correction Factors for Thermal-based Mass Flow Controllers
Flow Control Frequently Asked Questions FAQ's
Model-Based Solution for multigas Mass Flow Control with Pressure Insensitivity
Pressure Based Mass Flow Control for Ion Implant SDS Applications
Critical Evaluation of Thermal Mass Flow Meters
Flow Measurement & Control Discontinued Product manual archive
Discontinued Mass Flow Controllers & Meters
Recommended Replacements for Discontinued Products

MKS Instruments, Inc. Datasheets for Gas Flow Meters

Gas flow meters are used for measuring the flow or quantity of a moving gas in an enclosed pipe or passage.
Gas Flow Meters: Learn more

Product Name Notes
M330H/M330AH Analog Mass Flow Controller -- M330H/M330AH MKS Instruments has been at the forefrontof developing instrumentation for the delivery of low vapor pressurematerials. The M330H and M330AH high temperature mass flow controllersprovide two additional choices for the...
1480A ALTA; Digital Mass Flow Controller -- 1480A ALTA The all-digital MKS ALTA Mass FlowController (MFC) includes technology improvements in functionality andperformance to help users in semiconductor and high purity thin-filmapplications increase tool throughput and reduce overall system costs.To...
180A ALTA; Digital Mass Flow Meter -- 180A ALTA The all-digital MKS ALTA Mass FlowMeter (MFM) includes technology improvements in functionality andperformance to help users in semiconductor and high purity thin-filmapplications increase tool throughput and reduce overall system costs.To...
1150C Heated Mass Flow Controller -- 1150C
1152C Heated Mass Flow Controller -- 1152C
1153A Source Delivery System -- 1153A
1179A Analog Mass Flow Controller -- 1179A
1479A Analog Mass Flow Controller -- 1479A
1559A Analog Mass Flow Controller -- 1559A
1640A Mass Flow Controller -- 1640A
179A Mass-Flo; Analog Mass Flow Meter -- 179A
2179A Analog Mass Flow Controller -- 2179A
DELTA II Flow Ratio Controller -- DELTA II
GBROR Gas Box Flow Verifier -- GBROR
M100B Analog Mass Flow Controller -- M100B
M330B Analog Mass Flow Controller -- M330B
MC20 ALTA; Digital Mass Flow Controller -- MC20 ALTA
PFC-20 pMFC Digital Mass Flow Controller -- PFC-20
PFC-50 Digital Mass Flow Controller -- PFC-50
PFC-80 Digital Mass Flow Controller -- PFC-80
Tru-Flo; Mass Flow Verifier -- Tru-Flo
VoDM Vapor on Demand Module -- VoDM The MKS Instruments piMFC Low PressureThermal Mass Flow Controller (piMFC Low Pressure - PFC-20) is a multi-gas, multi-range metal sealed mass flow controller designed specifically for applications where low pressure...
1579 Digital Mass Flow Controller -- 1579 The MKS Type 1579 is a digital mass flow controller of the latest generation developed fora multitude of applications in research and industry. The 1579 is based on proven MKStechnology...
579 Digital Mass Flow Meter -- 579 The MKS Type 579 is a digital mass flow meter of the latest generation developed fora multitude of applications in research and industry. The 579 is based on proven MKStechnology...
PFC-60 Digital Mass Flow Controller -- PFC-60 The next generation MKS piMFC mass flow controller includes technology improvements in functionality and performance to help users in semiconductor and high purity thin-film applications increase tool throughput. Real-time accurate