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Parker PFA阀
Parker PFA Valves
UHP PFA Manual Diaphragm (1/2 inch) 3 Way Valve – MV-11 Series
The MV-11 Series PFA Valve offers high leak integrity and excellent resistance to corrosion. It is available in 3-way configurations and is designed for ultra-high purity (UHP) and aggressive fluid applications (up to 100 psig).
The MV-11 Series is a 1/2 inch PFA manual diaphragm valve that is designed for use in ultra-high purity (UHP) and aggressive gas and liquid handling systems, including semiconductor manufacturing operations. The valve is available in 3-way configurations and utilizes a molded PFA body with precision-machined sealing areas for superior leak integrity and chemical resistance. With a multi-position mounting base, the 3-way configuration allows for increased mounting flexibility and connector fitting reduction, making it advantageous in areas where workable space is limited.
The MV-11 Series PFA valve features a Fluoropolymer-coated stainless steel spring which reduces the effects of corrosive environments and ensures compatibility with a wide range of aggressive process media. The valve is also equipped with a one-piece machine modified PTFE diaphragm, which provides higher cycle life when compared to conventional PTFE. For increased flexibility, MV-11 Series valves can be fitted with a variety of port configurations, including Parflare and Pargrip tube fittings. The fittings reduce assembly time and installation costs, while ensuring a leak-tight seal for reliability in applications where cleanliness is critical.
The tongue and groove seal of the MV-11 Series valve ensures a positive diaphragm to body seal, resulting in high cycle life. Its full 1/2 inch orifice offers maximum flow capability in a compact package. Flow capacities vary depending on port size and configuration type (up to 3.7 Cv).
The MV-11 Series PFA valve is available with a submergible option, which isolates components from the external environment and allows the valve to remain functional while operating in wet or gaseous corrosive environments.
UHP PFA Manual Diaphragm (1/2 inch) 3 Way Valve – MV-11 Series 
Markets:
- Semiconductor
- Analytical Laboratory
- Pharmaceutical
- BioPharm
- Aerospace
- Industrial
Features/Benefits:
- Excellent leak integrity
- Modified PTFE diaphragm and Fluoropolymer-coated stainless steel spring provide high cycle life and exceptional resistance to corrosion
- Available in 3-way configuration
- Can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings
- Full ? inch orifice provides maximum flow capability in a compact package
- Fully functional from vacuum to 100 psig
- Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
- Fluid temperature range: 0°F to +266° F (-17°C to +130° C)
Applications:
- Corrosive and specialty gases
- Semiconductor Tools
- Tool Hook-ups
- Valve Manifold Boxes (VMBs)
Technical Specifications
| Wetted Material: |
PFA, Modified PTFE |
| Non-Wetted Material: |
PFA, PVDF,Viton Seals, PTFE Coated SS Springs |
| Pressure Rating: |
27" HG Vacuum (913 mbar) to 80 psig (5.5 bar) (COM TO NO), 27" HG Vacuum (913 mbar) to 25 psig (1.7 bar) Minimum (COM TO NC), 27" HG Vacuum (913 mbar) to 80 psig (5.5 bar) with 50 psig (3.4 bar) Maximum Back Pressure (NC TO COM) |
| Maximum Ambient Temperature: |
66 °C, 150 °F |
| Minimum Ambient Temperature: |
17 °C, 0 °F |
| Maximum Fluid Temperature: |
130 °C, 266 °F |
| Minimum Fluid Temperature: |
17 °C, 0 °F |
| Flow Rate: |
Cv: 1.9, 2.8 |
| Flow Coefficient: |
Kv: 27.1 to 40.0 L/min |
| Flow Control: |
3 Way |
UHP PFA Manual Diaphragm (1/2 inch) 3 Way Valve – MV-11 Series 型号
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