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Parker PFA阀
Parker PFA Valves
UHP PFA Manual Diaphragm (3/4 inch) 3 Way Valve – MV-16 Series

The MV-16 Series PFA Diaphragm Valve offers high leak integrity and excellent resistance to corrosion. It is available in 3-way configurations and is designed for ultra-high purity (UHP) and aggressive liquid and gas applications.

 

 

The MV-16 Series is a 3/4 inch PFA manual diaphragm valve that is designed for use in ultra-high purity (UHP) and aggressive fluid handling applications, including semiconductor manufacturing operations. The valve is available in 3-way configurations and utilizes a molded PFA body with precision-machined sealing areas for superior leak integrity and chemical resistance.

The MV-16 Series is equipped with a one-piece modified PTFE diaphragm, which provides excellent flexibility and higher cycle life than conventional PTFE. The valve also features an Fluoropolymer-coated stainless steel spring, which reduces the effects of corrosive environments and enables compatibility with a wide range of process media. Depending on customer requirements, MV-16 Series valves can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings. The fittings reduce assembly and installation time, while ensuring a leak-tight seal for performance in applications where cleanliness is critical.

The MV-16 Series PFA valve's exacting design controls seat and diaphragm stresses to provide a reliable and maintenance-free service life. Its tongue and groove seal ensures a positive diaphragm to body seal, resulting in high cycle life, lower replacement costs, and isolation of process media. The valve features a full 3/4 inch orifice with no restrictions for maximum flow in a compact package at working pressures up to 120 psig. Flow capacities are dictated by configuration and end type (up to 7.9 C?v for MV-16 with Parbond or Parflare connection). The MV-16 has multi-turn capability, which allows for precise flow adjustment.

UHP PFA Manual Diaphragm (3/4 inch) 3 Way Valve – MV-16 Series


Markets:
- Semiconductor
- Analytical Laboratory
- Pharmaceutical
- BioPharm
- Aerospace
- Industrial

Features/Benefits:
- Excellent leak integrity
- Modified PTFE diaphragm and Fluoropolymer-coated stainless steel spring provide high cycle life and exceptional resistance to corrosion
- Pressure rated in both forwards and backwards direction from vacuum to 120 psig
- Available in 3-way configuration
- Can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings
- Multi-turn capability allows for precise flow adjustment
- MV-16 Series has multi-turn capability, which allows for precise flow adjustment
- Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
- Fluid temperature range: 0°F to +266° F (-17°C to +130° C)

Applications:
- Corrosive and specialty gases
- Semiconductor Tools
- Tool Hook-ups
- Valve Manifold Boxes (VMBs)

 

Technical Specifications

Wetted Material: PFA. Modified PTFE
Non-Wetted Material: PVDF, Viton, PTFE Coated SS Spring
Pressure Rating: 0-120 psig (8.3 bar)
Maximum Ambient Temperature: 66 °C, 150 °F
Minimum Ambient Temperature: -17 °C, 0 °F
Maximum Fluid Temperature: 130 °C, 266 °F
Minimum Fluid Temperature: -17 °C, 0 °F
Flow Rate: Cv: 5.4, 7.3
Flow Coefficient: Kv: 77.0 to 104.1 L/min
Length: 5.54, 6.48, 9.12, 5.90 inch, 140.72, 164.59, 231.65, 149.86 mm

 

UHP PFA Manual Diaphragm (3/4 inch) 3 Way Valve – MV-16 Series 型号

Part Port Connection Type Nut Material Flow Control
MV-16-3612 3/4" Parflare PVDF 3 Way (COM, NC, NO)
MV-16-3612-01 3/4" Parflare Long PVDF 3 Way (COM, NC, NO)
MV-16-3612-T 3/4" Parflare PFA 3 Way (COM, NC, NO)
MV-16-3616 1" Parflare PVDF 3 Way (COM, NC, NO)
MV-16-3712 3/4" Parbond PFA 3 Way (COM, NC, NO)
MV-16-4612 3/4" Parflare PVDF 3 Way Reversed Ports (COM, NO, NC)
MV-16-4612-T 3/4" Parflare PFA 3 Way Reversed Ports (COM, NO, NC)
MV-16-4712 3/4" Parbond PFA 3 Way Reversed Ports (COM, NO, NC)

 

 

 



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