Parker PFA阀
Parker PFA Valves
Ultra High Purity Fluoropolymer (PFA) Valves - 22 Series

UHP Fluoropolymer ultra clean valves are made from PFA and PTFE for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries.

These new, ultra clean, fluoropolymer, manual and pneumatic valves offer increased flow and provide better seat sealing for enhanced, leak-free performance for greater safety. They are designed to deliver the highest flow in the smallest package available. Computational fluid dynamics software was utilized to maximize the flow through these valves. These ultra clean valves are for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries. Other demanding markets can use these valves for their cleanliness and ability to carry highly corrosive chemicals.

22 Series PFA Valves Quarter Inch

22 Series PFA Valves Half Inch

Markets:
- Semiconductor processing
- Chemical Processing
- Analytical Equipment
- Laboratory

Features/Benefits:
- High cycle life in acids and slurry
- Compact footprint with a true lock-out, tag-out design (LOTO)
- Dual point seal provides double the sealing power (patent pending)
- Smooth bore and fully swept path, minimizes particle entrapment areas and prevents stagnation
- 100% leak tested
- Meets SEMI-F57-0301 Standards

Key Applications:
- Chemical Mechanical Polishing (CMP) Slurries
- Ultra high purity processes
- Clear chemistries for semiconductor processes
- Blender systems
- Cleaning systems

Technical Specifications

Ultra High Purity Fluoropolymer (PFA) Valves - 22 Series 型号