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Parker PFA阀
Parker PFA Valves
Ultra High Purity Fluoropolymer (PFA) Valves - 22 Series
UHP Fluoropolymer ultra clean valves are made from PFA and PTFE for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries.
These new, ultra clean, fluoropolymer, manual and pneumatic valves offer increased flow and provide better seat sealing for enhanced, leak-free performance for greater safety. They are designed to deliver the highest flow in the smallest package available. Computational fluid dynamics software was utilized to maximize the flow through these valves. These ultra clean valves are for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries. Other demanding markets can use these valves for their cleanliness and ability to carry highly corrosive chemicals.
22 Series PFA Valves Quarter Inch
22 Series PFA Valves Half Inch
Markets:
- Semiconductor processing
- Chemical Processing
- Analytical Equipment
- Laboratory
Features/Benefits:
- High cycle life in acids and slurry
- Compact footprint with a true lock-out, tag-out design (LOTO)
- Dual point seal provides double the sealing power (patent pending)
- Smooth bore and fully swept path, minimizes particle entrapment areas and prevents stagnation
- 100% leak tested
- Meets SEMI-F57-0301 Standards
Key Applications:
- Chemical Mechanical Polishing (CMP) Slurries
- Ultra high purity processes
- Clear chemistries for semiconductor processes
- Blender systems
- Cleaning systems
Technical Specifications
Body Material: |
PFA |
Diaphragm Material: |
Modified PTFE |
Housing Material: |
PVDF |
Spring Material: |
SS, Fluoropolymer Coated |
Screw Material: |
SS |
Maximum Operating Pressure: |
80 psig |
Actuation Pressure: |
60 to 100 psig |
Operating Temperature: |
32 to 212 °F, 0 to 100 °C |
Proof Pressure: |
120 psig |
Burst Pressure: |
200 psig |
Flow Rate: |
0.33, 0.82, 2.3, 4.3 |
Ultra High Purity Fluoropolymer (PFA) Valves - 22 Series 型号
Part |
Valve Size (Inch) |
Actuation |
Housing Connection Thread Size (inch) |
Connection 1 Style |
Connection 1 Size |
Connection 2 Style |
Connection 2 Size |
Connection Material |
Material Cover Type |
Special Options |
MV2204VN0FL04FL04T |
1/4" |
Manual, 1/4 Turn Loto |
NA |
Flare |
1/4" |
Flare |
1/4" |
PFA Nut |
PVDF |
None |
MV2204VN0FL04FL04V |
1/4" |
Manual, 1/4 Turn Loto |
NA |
Flare |
1/4" |
Flare |
1/4" |
PVDF Nut |
PVDF |
None |
MV2204VN0FL06FL06T |
3/8" |
Manual, 1/4 Turn Loto |
NA |
Flare |
3/8" |
Flare |
3/8" |
PFA Nut |
PVDF |
None |
MV2204VN0FL06FL06V |
3/8" |
Manual, 1/4 Turn Loto |
NA |
Flare |
3/8" |
Flare |
3/8" |
PVDF Nut |
PVDF |
None |
PV2204VN1FL04FL04T |
1/4" |
Pnuematic-Normally Closed |
10-32 |
Flare |
1/4" |
Flare |
1/4" |
PFA Nut |
PVDF |
None |
PV2204VN1FL04FL04V |
1/4" |
Pnuematic-Normally Closed |
10-32 |
Flare |
1/4" |
Flare |
1/4" |
PVDF Nut |
PVDF |
None |
PV2204VN1FL06FL06T |
3/8" |
Pnuematic-Normally Closed |
10-32 |
Flare |
3/8" |
Flare |
3/8" |
PFA Nut |
PVDF |
None |
PV2204VN1FL06FL06V |
3/8" |
Pnuematic-Normally Closed |
10-32 |
Flare |
3/8" |
Flare |
3/8" |
PVDF Nut |
PVDF |
None |
PV2204VN2FL04FL04T |
1/4" |
Pnuematic-Normally Open |
10-32 |
Flare |
1/4" |
Flare |
1/4" |
PFA Nut |
PVDF |
None |
PV2204VN2FL04FL04V |
1/4" |
Pnuematic-Normally Open |
10-32 |
Flare |
1/4" |
Flare |
1/4" |
PVDF Nut |
PVDF |
None |
PV2204VN2FL06FL06T |
3/8" |
Pnuematic-Normally Open |
10-32 |
Flare |
3/8" |
Flare |
3/8" |
PFA Nut |
PVDF |
None |
PV2204VN2FL06FL06V |
3/8" |
Pnuematic-Normally Open |
10-32 |
Flare |
3/8" |
Flare |
3/8" |
PVDF Nut |
PVDF |
None |
PV2208VN1FL08FL08T |
1/2" |
Pnuematic-Normally Closed |
10-32 |
Flare |
1/2" |
Flare |
1/2" |
PFA Nut |
PVDF |
None |
PV2208VN1FL08FL08V |
1/2" |
Pnuematic-Normally Closed |
10-32 |
Flare |
1/2" |
Flare |
1/2" |
PVDF Nut |
PVDF |
None |
PV2208VN1FL12FL12T |
3/4" |
Pnuematic-Normally Closed |
10-32 |
Flare |
3/4" |
Flare |
3/4" |
PFA Nut |
PVDF |
None |
PV2208VN1FL12FL12V |
3/4" |
Pnuematic-Normally Closed |
10-32 |
Flare |
3/4" |
Flare |
3/4" |
PVDF Nut |
PVDF |
None |
PV2208VN2FL08FL08T |
1/2" |
Pnuematic-Normally Open |
10-32 |
Flare |
1/2" |
Flare |
1/2" |
PFA Nut |
PVDF |
None |
PV2208VN2FL08FL08V |
1/2" |
Pnuematic-Normally Open |
10-32 |
Flare |
1/2" |
Flare |
1/2" |
PVDF Nut |
PVDF |
None |
PV2208VN2FL12FL12T |
3/4" |
Pnuematic-Normally Open |
10-32 |
Flare |
3/4" |
Flare |
3/4" |
PFA Nut |
PVDF |
None |
PV2208VN2FL12FL12V |
3/4" |
Pnuematic-Normally Open |
10-32 |
Flare |
3/4" |
Flare |
3/4" |
PVDF Nut |
PVDF |
None |
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