Trelleborg特瑞堡密封系统半导体密封件Semiconductor Seals 应用Application Examples

Trelleborg特瑞堡半导体行业应用——半导体行业解决方案

我们致力于提供工业化解决办法，并且为用户提供定制化的密封和轴承解决方案，提高其应用性能。尤其在下列行业内我们拥有丰富的经验和成熟的系统解决方案。 Since we specialize in industry-specific solutions, we are able to provide customers tailor-made sealing and bearing solutions, specifically developed to meet their application requirements. In particular, we have long term experience in sealing and bearing applications within the following sectors:

Trelleborg特瑞堡半导体行业解决方案

我们致力于提供工业化解决办法，并且为用户提供定制化的密封和轴承解决方案，提高其应用性能。尤其在下列行业内我们拥有丰富的经验和成熟的系统解决方案。 Since we specialize in industry-specific solutions, we are able to provide customers tailor-made sealing and bearing solutions, specifically developed to meet their application requirements. In particular, we have long term experience in sealing and bearing applications within the following sectors:

高性能密封技术High performance sealing technology

我们广泛的创新密封材料帮助我们提供卓越的密封完整性。任何尺寸的O型环（标准或定制）可与定制的模压密封设计和粘合产品一起提供，材料从基本弹性体等级到前沿高规格化合物，有些是专门为半导体设备应用开发的。这些创新的密封材料有助于减少停机时间和提高生产效率延长密封寿命。Our extensive range of innovative seal materials helps us deliver exceptional sealing integrity. Any size of O-Ring (standard or custom) is available alongside custom molded seal designs and bonded products - in materials ranging from basic elastomer grades to leading edge, high specification compounds , some specifically developed for semiconductor equipment applications. These innovative sealing materials help reduce downtime and improve production efficiency by extending seal life.

佳解决方案The optimum solution

Trelleborg Sealing Solutions works with semiconductor customers in development partnerships .我们可以共同确定一个适用于材料和海豹剖面的宽选择的佳封装选择。 Together we can identify the best sealing option for specific applications from a broad choice of materials and seal profiles.

探索我们的解决方案Explore our solutions

新的半导体工艺要求越来越多。为了满足这些需要，开发了创新的封装解决方案，如下面列举的那些解决方案。The latest semiconductor processes have increasingly challenging requirements . To fulfill these needs, innovative sealing solutions such as those listed below, are developed.

• Longer life in CVD Equipment CVD设备使用寿命更长
• Maintaining a vacuum in plasma 在等离子体中保持真空
• Rotary seal for electric CVD motor 电动无级变速电机旋转密封
• Passing strict leakage tests 通过严格的泄漏测试
• Isolast helps reduce maintenance Isolast有助于减少维护
• Isolast lowers cost of ownership isolast降低了拥有成本
• Eliminating leakage 消除泄漏

Longer life in CVD Equipment CVD设备使用寿命更长

密封问题Sealing issue:

cvd设备的用户对密封产品的质量要求很高。高真空需要超干净的密封以防止污染。此外，通常有非常苛刻的化学和/或热环境。The users of CVD equipment require high-quality sealing products. High vacuums need ultra-clean seals to prevent contamination. In addition, there are often very demanding chemical and/or thermal environments.

我们的客户一直在寻求改进其产品，所以他们在现有的应用中尝试了隔离环J9670材料中的O形密封圈。Our customer is always looking to improve its products, so they tried out O-Ring seals in Isolast J9670 material within existing applications.

解决方案Solution:

由ISOLAST J9670制造的O型环。该专利全氟弹性体化合物是isolast fab range?之一，专为半导体应用而设计。它的设计工作温度高达315°C/599°F，对几乎所有化学物质都具有优异的抵抗能力。O-Rings manufactured from Isolast J9670 . This proprietary perfluoroelastomer compound is one of the Isolast Fab Range? especially engineered for semiconductor applications . It is designed to operate at temperatures up to 315°C / 599°F and offers superior resistance to almost every chemical.

结果Result:

在各种等离子体气体中测试了六个月后，密封件没有裂纹特别是，这种密封比以前的密封更能抵抗SF6等离子体气体。这意味着Isolast J9670的使用寿命更长。After six months of testing Isolast J9670 within various plasma gases, there were no cracks in the seals . In particular, the seals proved more resistant to SF6 plasma gas than previous seals. This meant that Isolast J9670 gave a longer operating life .

在过去的两年半中，客户在其设备中集成了Isolast J9670密封件。For the last two-and-a-half years, the customer has integrated Isolast J9670 seals in its equipment.

在等离子体中保持真空Maintaining a vacuum in plasma

密封问题Sealing issue:

任务是密封进入加工室的旋转进料需要保持500托的真空，同时密封以容纳反应性等离子体气体。试验室连续使用一小时，每小时关闭五分钟。The task was to seal a rotary feed-through that went into a process chamber. A vacuum of 500 Torr needed to be maintained along with a tight seal to contain reactive plasma gases . The chamber was in continuous use for one hour with a five minute shut-down each hour.

解决方案Solution:

带有Turcon T78护套和中等负荷哈氏合金弹簧的Turcon Variseal CM及其产品Turcon Variseal CM with a Turcon T78 jacket and medium-load Hastelloy spring along with an Products

结果Result:

Turcon Variseal厘米能够在间歇工作期间保持所需的真空，同时暴露在等离子体气体中。The Turcon Variseal CM was able to hold the required vacuum during intermittant service while exposed to the plasma gases.

使用条件Service Conditions:

• Vacuum
• 121°C / 250°F
• 5 to 7 rpm
• Gases

电动无级变速电机旋转密封Rotary seal for electric CVD motor

密封问题Sealing issue:

任务是用一种化学惰性、无污染、长寿命的密封件取代目前的橡胶唇形密封。这必须改装成现有的硬件。The task was to replace the current rubber lip seal with a chemically inert, non-contaminating, long-life seal. This had to be retrofitted into existing hardware.

解决方案Solution:

Turcon T78中的Turcon Varilip PDR，以低放气FKM O型环作为激发剂。Turcon Varilip PDR in Turcon T78 with low outgassing FKM O-Ring as an energizer.

结果Result:

Turcon T78材料在应用中对所需气体提供了有效的阻力，并延长了电机的使用寿命。The Turcon T78 material provided effective resistance to the demanding gases within the application and also extended the service life of the motor.

使用条件Service Conditions:

• 0 psi
• Ambient
• 5.41 m/s / 17.7 ft/ s
• Nitrogen

通过严格的泄漏测试Passing strict leakage tests

密封问题Sealing issue:

像氦这样的轻气体尤其难以密封，因为它们能够渗透到表面光洁度的山谷中。Light gases like helium can be especially difficult to seal because of their ability to permeate through even the valleys of a surface finish.

再加上高真空，这种应用非常困难，要求密封件通过严格的泄漏试验。此外，密封槽必须保留密封件，以便在密封件不脱落的情况下将其从石英上提起。Combined with high vacuum, this application was very difficult and required the seal to pass strict leakage tests. Also, the seal groove had to retain the seal so that it could be lifted from the quartz without the seal falling out.

解决方案Solution:

定制turcon variseal mf，带有turcon t01护套和两个嵌套的重载v形弹簧。Custom Turcon Variseal MF with a Turcon T01 jacket and two nested heavy-load V-springs.

结果Result:

如上图所示夹紧密封件不仅将其保留在槽内，而且消除了一条泄漏路径。嵌套的V形弹簧在密封套上提供了所需的载荷，以满足严格的泄漏要求Clamping the seal as shown in the diagram above not only retained it within the groove but eliminated one leakage path . The nested V-springs provided the required load on the seal jacket to pass the strict leakage requirements.

使用条件Service Conditions:

• 3.6 x 10-6 torr
• -73°C to 100°C / -100°F to 212°F
• Static
• Helium

产品Products:

变压密封MF V形弹簧通电端面密封Variseal MF V-spring-energized face seal

Isolast有助于减少维护Isolast helps reduce maintenance

密封问题Sealing issue:

作为工厂制造过程的一部分，在薄膜沉积的每一个处理步骤之后，一个干燥的“条状”系统从wafers上去除光刻胶和残留物。As a part of the fab manufacturing process, following each processing step of film deposition, a dry ‘strip' system removes photoresist and residues from wafers.

为此，wafers在高温下暴露在气态氧等离子体中。这导致系统内的密封件迅速恶化，频繁更换密封件中断生产。To do this the wafer is exposed to gaseous oxygen plasma at high temperatures. This was causing seals within systems to quickly deteriorate , interrupting production with frequent seal changeover.

解决方案Solution :

O型环由ISOASTA FAB系列J9670制造，专门设计用于高温等离子体环境，取代了现有的密封件。O-Rings manufactured from Isolast Fab Range? J9670, specifically engineered for high temperature plasma environments, replaced the existing seals .

结果：延长了维护周期，在更换密封件期间，硅片产量从15000-20000片增加到50000片以上。这满足了制造商的目标，即增加计划维修之间的平均时间，提高总产量和降低成本。Result: Maintenance cycles were extended, increasing production from 15,000-20,000 to over 50,000 wafers between seal changes. This met the fab manufacturer's aim of increasing mean time between planned maintenance, improving overall production yield and lowering costs.

isolast降低了成本Isolast lowers cost of ownership

密封问题Sealing issue:

一家主要的wafer探针卡制造商在生产过程中使用了等离子蚀刻设备，密封件暴露在要求很高的等离子和清洗剂中。A major manufacturer of wafer probe cards used plasma etch equipment in their production process and seals were exposed to demanding plasmas and cleaning agents .

安装在等离子蚀刻设备上的O型环作为定期预防性维护定期更换客户希望通过延长计划维护之间的交货期来降低拥有成本。O-Rings fitted in plasma etch equipment were regularly replaced as a matter of scheduled preventative maintenance. The customer wanted to lower cost of ownership by extending leadtime between planned maintenance.

解决方案Solution:

O型环由ISOASTA FAB系列J9670制造，专门设计用于高温等离子体环境，取代了现有的密封件。O-Rings manufactured from Isolast Fab Range? J9670 , specifically engineered for high temperature plasma environments, replaced the existing seals.

结果Result:

由Isolast Fab Range J9670制造的O形密封圈证明延长了密封寿命这意味着可以延长计划维护之间的提前期，并达到降低拥有成本的目标。The O-Rings manufactured from Isolast Fab Range J9670 proved to give extended seal life. This meant leadtimes between planned maintenance could be lengthened and the objective of lowering cost of ownership was met.

消除泄漏Eliminating leakage

密封问题Sealing issue:

此应用中的密封件需要通过两次泄漏测试-氦泄漏不能超过10 cc/sec，当密封水时，密封件必须是自由下落的还需要低摩擦。The seal in this application was required to pass two leakage tests— helium leakage could not exceed 10 cc/sec , and when sealing water, the seal had to be drop-free . Low friction was also required.

解决方案Solution:

法兰连接Flanged

• Turcon Variseal

FW with a

• Turcon

T05夹套和中载斜螺旋弹簧。T05 jacket and medium-load Slantcoil spring .

结果Result:

在这种应用中，法兰式Turcon Variseal FW被用于有效地消除O.D.的泄漏，而介质弹簧提供了正确的负载，以实现摩擦和密封性之间的平衡。In this application the flanged Turcon Variseal FW was used to effectively eliminate leakage across the O.D. , while the medium spring provided the correct load to achieve a balance between friction and sealability.

使用条件Service Conditions:

• 0 to 0,6 MPa / 0 to 90 psi
• 52°C to 200°C / 125°F to 392°F
• 0.4 rpm
• 0.05 m/s / 0.16 ft/s
• Hydrogen, Water, HCl

产品Products:

Turcon Variseal w斜线圈带电杆密封Turcon Variseal W Slantcoil-energized rod seal

Turcon Variseal FW斜线圈通电法兰密封Turcon Variseal FW Slantcoil-energized flange seal

了解我们是如何应对半导体制造设备行业的密封挑战的。

功能	产品系列
材料	应用

Trelleborg 特瑞堡密封系统是全球领先的密封解决方案供应商。 我们的产品范围包括 O形圈 ， 液压密封件 ， 旋转密封件 ， 油封 ， 静态密封件 ， 气动密封件 ， 机械端面密封件等等。 Trelleborg Sealing Solutions is a leading global supplier of sealing solutions. Our range of products includes O-Rings , hydraulic seals , rotary shaft seals , oil seals , static seals , pneumatic seals , mechanical face seals and many more.