Trelleborg特瑞堡密封系统半导体密封件Semiconductor Seals 材料Materials
Trelleborg特瑞堡半导体行业应用——半导体材料
我们致力于提供工业化解决办法,并且为用户提供定制化的密封和轴承解决方案,提高其应用性能。尤其在下列行业内我们拥有丰富的经验和成熟的系统解决方案。 Since we specialize in industry-specific solutions, we are able to provide customers tailor-made sealing and bearing solutions, specifically developed to meet their application requirements. In particular, we have long term experience in sealing and bearing applications within the following sector
Trelleborg特瑞堡半导体材料
我们致力于提供工业化解决办法,并且为用户提供定制化的密封和轴承解决方案,提高其应用性能。尤其在下列行业内我们拥有丰富的经验和成熟的系统解决方案。 Since we specialize in industry-specific solutions, we are able to provide customers tailor-made sealing and bearing solutions, specifically developed to meet their application requirements. In particular, we have long term experience in sealing and bearing applications within the following sectors:
高性能密封技术High performance sealing technology
我们广泛的创新密封材料帮助我们提供卓越的密封完整性。任何尺寸的O型环(标准或定制)可与定制的模压密封设计和粘合产品一起提供,材料从基本弹性体等级到前沿高规格化合物,有些是专门为半导体设备应用开发的。这些创新的密封材料有助于减少停机时间和提高生产效率延长密封寿命。Our extensive range of innovative seal materials helps us deliver exceptional sealing integrity. Any size of O-Ring (standard or custom) is available alongside custom molded seal designs and bonded products - in materials ranging from basic elastomer grades to leading edge, high specification compounds , some specifically developed for semiconductor equipment applications. These innovative sealing materials help reduce downtime and improve production efficiency by extending seal life.
Effective FKM Sealing
氟橡胶(FKM)密封件非常适合下游应用,如真空泵和温度不超过220°C/428°F的湿工艺应用。Fluoroelastomer (FKM) seals are ideal for downstream applications such as vacuum pumps and wet process applications where temperatures do not exceed 220°C/428°F.
我们的一系列fkm密封材料对半导体工业中使用的各种化学品表现出优异的耐腐蚀性,同时为半导体真空应用提供低渗透和放气水平的高纯度。Our range of FKM sealing materials exhibits excellent resistance to a wide range of chemicals used in the semiconductor industry, while offering high purity with low permeation and outgassing levels for semiconductor vacuum applications.
Products:
- O-Rings O形圈
- Custom designed seals 定制设计的密封件
- Fleximold 柔性模具
Isolast Fab Range
Isolast Fab Range offers the ultimate in elastomer sealing.
这些高性能全氟弹性体(ffkm)实际上是惰性的,并且在高达325oC/617的连续温度下工作时显示出几乎普遍的化学相容性。These high-performance Perfluoroelastomers (FFKM) are virtually inert and demonstrate almost universal chemical compatibility while operating at continuous temperatures up to 325°C/617°F.
Industry specific sealing
Isolast J9610 for wet process applications - the highest level of chemical resistance. 用于湿工艺应用的Isolast J9610-高水平的耐化学性
- Isolast J9610 for wet process applications - the highest level of chemical resistance. 用于湿工艺应用的Isolast J9610-高水平的耐化学性
- Isolast J9650 for high-temperature wafer processing applications - ultra-high purity.
- Isolast J9675 for dry/plasma wafer processes - excellent chemical resistance and minimal particulation.
isolast fab系列密封材料可用于标准和非标准o形环、工程模压密封设计或与金属密封部件粘合。密封件在洁净室环境中制造和包装。The Isolast Fab Range sealing materials are available in standard and non-standard O-Rings, engineered molded seal designs or as bonded to metal sealing components . Seals are manufactured and packaged in a cleanroom environment.
Resifluor 500 increases flexibility
Resifluor 500系列由具有改性聚合物结构的优质fkm密封材料组成。树脂氟500化合物的设计结合了三元乙丙橡胶对极性流体、碱和酸的耐化学性,以及fkm密封材料在各种要求流体中的性能特点。The Resifluor 500 range consists of premium FKM sealing materials with modified polymer architecture. Resifluor 500 compounds are engineered to combine the chemical resistance of an EPDM towards polar fluids, alkalis and acids, with the performance characteristics of FKM sealing materials in a variety of demanding fluids.
Seals with outstanding resistance阻力大的密封件
Resifulor 500密封范围具有优异的抗大量化学品和液体攻击能力。它具有低总有机碳和类似于聚四氟乙烯的金属可萃取性,提供了卓越的清洁度。The Resifluor 500 sealing range has outstanding resistance to attack by a large number of chemicals and fluids . It has low total organic carbon and metal extractables similar to PTFE, providing exceptional cleanliness .
Products
- O-Rings O形圈
- Custom designed seals
- Fleximold 柔性模具
Unique Turcon compounds
Turcon是Trelleborg密封解决方案系列专有聚四氟乙烯基密封材料的名称。Turcon is the name for the Trelleborg Sealing Solutions range of proprietary PTFE based sealing material.
从本质上讲,聚四氟乙烯(PTFE)与几乎所有的化学品都兼容,使其成为密封件可能暴露在苛刻介质中的设备的理想选择。通过添加填料和特殊加工技术,可获得特定的操作性能。Inherently, Polytetrafluoroethylene (PTFE) is compatible with almost all chemicals, making it ideal for use in equipment where seals are likely to be exposed to demanding media. Specific operating properties are achieved by the addition of fillers and special processing technologies.
动态和旋转密封元件Dynamic and rotating sealing elements
Turcon sealing materials:
- Give excellent friction and self-lubricating characteristics 具有优异的摩擦和自润滑特性
- Are suited to dynamic and rotating applications 适用于动态和旋转应用
The world's largest manufacturer of PTFE based seals
Trelleborg密封解决方案公司是世界上大的此类密封材料制造商,没有其他密封供应商能提供如此广泛的等级所有这些都是我们在欧洲、美国、南美和亚洲的工厂生产的。Trelleborg Sealing Solutions is the world's largest manufacturer of seals in this type of material, and no other sealing supplier can offer such a wide range of grades . All of these are produced at our own facilities in Europe, US, South America and Asia.
Turcon密封材料是在各种不同的密封几何形状下制造的以下是半导体行业常用的密封类型:Turcon sealing materials are manufactured in a wide range of different seal geometries. Those listed below are the seal types most commonly used in the semiconductor industry:
Products
- Turcon Varilip PDR
- Turcon Variseal NW
- Turcon Variseal PS
- Turcon Variseal Ultra-Clean
Advanced engineered thermoplastics
高性能工程热塑性塑料为聚醚醚酮(PEEK)和聚酰亚胺等材料提供了新的密封解决方案它们能承受高工作温度,表现出良好的耐化学和等离子体性能,静电控制和低放气。High-performance engineered thermoplastics offer novel sealing solutions in materials such as PEEK (Polyether Ether Ketone) and polyimide . These withstand high service temperatures, demonstrate good chemical and plasma resistance, electrostatic control and low outgassing.
From bearing to bellows 从轴承到波纹管
HiMod wear rings and bearings从轴承到波纹管和轴承
已在许多半导体应用中证明是成功的,这些应用要求卓越的尺寸稳定性和低颗粒脱落。have proved successful in a number of semiconductor applications which require outstanding dimensional stability and low particle shedding.
专业的Turcon PTFE组件包括波纹管。它们为橡胶接头提供了高纯度和化学相容的选择。Specialized Turcon PTFE based components include bellows. They offer a high-purity and chemically compatible option for rubber joints.
了解我们是如何应对半导体制造设备行业的密封挑战的。
Trelleborg 特瑞堡密封系统是全球领先的密封解决方案供应商。 我们的产品范围包括 O形圈 , 液压密封件 , 旋转密封件 , 油封 , 静态密封件 , 气动密封件 , 机械端面密封件等等。 Trelleborg Sealing Solutions is a leading global supplier of sealing solutions. Our range of products includes O-Rings , hydraulic seals , rotary shaft seals , oil seals , static seals , pneumatic seals , mechanical face seals and many more.
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